4------测试硬件简介---探针卡(prober card)
探针卡(prober card) 是晶圆测试(wafer test)中被测芯片和测试机之间的接口.2 T3 y0 h; ?9 R
探针卡对前期测试的开发及后期量产测试的良率的保证都非常重要.
) t0 F; U2 h8 b9 E( _一.下面介绍一常见的几类探针卡。
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* z( O& }5 L0 l* @: f+ j/ L1.Blade Type : Under 70 pins,low speed
, }, y1 d5 o2 w) a. E/ r$ I# H( I LOW CURRENT PROBING
6 S' Y. O( `9 ]7 W$ n0 g PROBING AT EXTREME TEMPERATURES: > 200ºC1 f/ _$ J% n; P' B8 _. B% e
RF PROBING: > 3 GHZ/ T7 K3 |* h' L1 w4 g
Low cost
5 J; @7 {, `( j3 { Lead time 1 day
) E; g' D) p9 B- M% p. O- d- D刀片式:结构稳定,抗干扰性好,可用于RF测试。
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2.Epoxy Type ; <1000pins
" f: D, s5 Y& T Large Array /Multi-DUT Probing
+ |; N( t4 S5 ? Tight Pitch Applications
* G1 A* @( J5 S# D3 {, D0 w' a" w" I, X" I High Temperature Applications
- y- l. W2 G1 X; b- h- n) Z Lead time 4 weeks for new design# f d1 j5 ?. @ W
Repeat order 2 weeks9 {5 Z# }# T( M! N+ j" A9 |. }
环氧树脂(悬臂式):比较流行的一种卡,针间的pitch可以做的很小,' C2 w0 n- Y) v/ D) v1 X
同一张卡里针的数量也做的比较多.
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3.Vertical Type: >1000 pins or high speed
' w5 o& c" `, [6 A% `9 g Multi-DUT Probing" B$ k& N R$ L: n% F
Parallel and Grid Array Probing Capacities7 Q# F7 o+ ~# I% A' _: Q& I
High Accuracy
) H+ E# D* s9 J4 w6 c, q High Contact Quality. L ^; O! e: X1 \$ J' M# {- Y
By 32 parallel or above
7 m% E# A/ E! V% A, m- \" h8 f Lead time 10-12 weeks for new design
: R4 \, F9 V7 e/ f垂直式:一张卡了可以做的针的数量非常多,可以做几千个针。针定位精确,
' p. P# y! y' [8 j8 O; Q和芯片上pad的接触效果好.
8 T. L( J* a" Y4 }0 K二.探针卡主要的供应商.- G4 d2 }$ o) j" D
Company Location
3 }" z2 z1 R+ C, U; {( K/ iK&S US/TW/China% r2 C, C3 u, i2 `; h
Cascade US
6 M( N3 x b( h7 ^8 [. ]WWL US, i# f- Z4 z, a/ N) p
FormFactor US
4 o4 E3 p7 u: O0 ]+ L8 C* nProbe2000 US
+ w' q& i. ^. H3 c8 f- I2 IJEM Japan4 @5 L9 }% T# a4 V, }; W
MJC Japan: Y1 s R! K; w7 _3 X
TCL Japan/China' h5 {! k5 W7 j c
Thicom Korea
i9 h. ~6 X( K9 h% T8 f$ SSiprox TW6 c0 _- S0 \1 n7 E2 Z% p V4 l
Probe Technology TW% X" h7 A; o1 X, U7 O# N' ~
KTTI TW. j$ i. z8 X; I/ G
爱普升 TW# P. i: K& t( t5 ^) Z: e
Microprobe TW
; t2 n/ p3 \8 Q* O- JMPI TW
- ?6 J# i3 c1 RMETEK TW) | w4 B( f0 c5 M: q2 k
MMS (MJC and MPI ) Shanghai
% Q& d, x) K7 v& Z' ^Kimpsion Corp. TW
" r6 s2 G' T* X2 c. s: K0 gShanghai Yiyuan Shanghai+ H& K/ J2 v1 A& S
NPCL CMAI TW
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